Method for repairing reflective optical elements for EUV lithography
US-11099484-B2 · Aug 24, 2021 · US
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Meier Robert patents
Meier Robert is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Meier Robert |
| Total patents | 4 |
| First publication | Jun 6, 2019 |
| Latest publication | Aug 24, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Reflective optical element for EUV lithography
US-10649340-B2 · May 12, 2020 · US
Method for repairing reflective otpical elements for euv lithography
US-2019302628-A1 · Oct 3, 2019 · US
Reflective optical element for euv lithography
US-2019171108-A1 · Jun 6, 2019 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G21K1/062 | 4 |
| G21K2201/067 | 4 |
| G03F7/70033 | 4 |
| G03F7/70316 | 4 |
| G02B5/0891 | 2 |