Reducing aspect ratio dependent etch with direct current bias pulsing
US-12237149-B2 · Feb 25, 2025 · US
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Li Deyang patents
Li Deyang is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Li Deyang |
| Total patents | 2 |
| First publication | May 16, 2024 |
| Latest publication | Feb 25, 2025 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J2237/3341 | 2 |
| H01J37/32091 | 2 |
| H01J37/32174 | 2 |
| H01J37/32165 | 2 |
| H01J37/32128 | 2 |