Apparatus and method of trapping an exhaust material from a substrate-processing process and apparatus for processing a substrate including the trapping apparatus
US-2025352949-A1 · Nov 20, 2025 · US
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Lee Uihyoung patents
Lee Uihyoung is listed as an inventor on 15 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Lee Uihyoung |
| Total patents | 15 |
| First publication | Nov 12, 2015 |
| Latest publication | Nov 20, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus trapping an exhaust material from a substrate-processing process and apparatus for processing a substrate including the trapping apparatus
US-12390763-B2 · Aug 19, 2025 · US
Methods of fabricating semiconductor devices
US-2025118600-A1 · Apr 10, 2025 · US
Flow control method using plasma system
US-12247290-B2 · Mar 11, 2025 · US
Method of fabricating a semiconductor device
US-2025079238-A1 · Mar 6, 2025 · US
Method of forming contact included in semiconductor device
US-12238923-B2 · Feb 25, 2025 · US
Methods of fabricating semiconductor devices
US-12211745-B2 · Jan 28, 2025 · US
Method of forming contact included in semiconductor device
US-2024098986-A1 · Mar 21, 2024 · US
Flow control method using plasma system
US-2024026539-A1 · Jan 25, 2024 · US
Method of forming contact included in semiconductor device
US-11871563-B2 · Jan 9, 2024 · US
Recent patents
Latest publications not already listed above.
Apparatus and method of trapping an exhaust material from a substrate-processing process and apparatus for processing a substrate including the trapping apparatus
US-2023068823-A1 · Mar 2, 2023 · US
Method of forming contact included in semiconductor device
US-2022415902-A1 · Dec 29, 2022 · US
Methods of fabricating semiconductor devices
US-2022359282-A1 · Nov 10, 2022 · US
Apparatus for and method of processing substrate
US-9812331-B2 · Nov 7, 2017 · US
Apparatus for and method of processing substrate
US-2015325490-A1 · Nov 12, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 15 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10W20/056 | 8 |
| H10W20/033 | 8 |
| H10P14/47 | 5 |
| H10W20/023 | 5 |
| H10W20/076 | 5 |