Measurement system, lithographic apparatus and device manufacturing method
US-11009800-B2 · May 18, 2021 · US
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Kruizinga Borgert patents
Kruizinga Borgert is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kruizinga Borgert |
| Total patents | 12 |
| First publication | Apr 5, 2016 |
| Latest publication | May 18, 2021 |
Notable patents
Publications ranked by popularity score, then publication date.
Measurement system, lithographic apparatus and device manufacturing method
US-2020379360-A1 · Dec 3, 2020 · US
Beam delivery apparatus and method
US-10580545-B2 · Mar 3, 2020 · US
High resolution broadband monolithic spectrometer and method
US-10508951-B2 · Dec 17, 2019 · US
High resolution broadband monolithic spectrometer and method
US-2019017869-A1 · Jan 17, 2019 · US
Lithographic method
US-2018081278-A1 · Mar 22, 2018 · US
Radiation system
US-2018031982-A1 · Feb 1, 2018 · US
Lithographic method
US-9823572-B2 · Nov 21, 2017 · US
Beam delivery apparatus and method
US-2016225477-A1 · Aug 4, 2016 · US
Depolarizer, telescope and remote sensing device and method
US-9383490-B2 · Jul 5, 2016 · US
Recent patents
Latest publications not already listed above.
Lithographic method
US-2016147161-A1 · May 26, 2016 · US
Anamorphotic telescope
US-9304300-B2 · Apr 5, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 8 |
| TNO | 4 |
| Nederlandse Organisatie Voortoegepast Natuurwetenschappelijk Onderzoek Tno | 1 |
| Visser Huibert | 1 |
| Kruizinga Borgert | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01S3/0903 | 5 |
| H05H7/04 | 5 |
| G03F7/70008 | 5 |
| G03F7/7085 | 5 |
| G03F1/84 | 4 |