Measuring local CD uniformity using scatterometry and machine learning
US-12165023-B2 · Dec 10, 2024 · US
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Koret Roy patents
Koret Roy is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Koret Roy |
| Total patents | 6 |
| First publication | Feb 22, 2018 |
| Latest publication | Dec 10, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Measuring local cd uniformity using scatterometry and machine learning
US-2023131932-A1 · Apr 27, 2023 · US
Method and system for optical metrology in patterned structures
US-10761036-B2 · Sep 1, 2020 · US
Method and system for optical metrology in patterned structures
US-2019317024-A1 · Oct 17, 2019 · US
Method and system for optical metrology in patterned structures
US-10274435-B2 · Apr 30, 2019 · US
Method and system for optical metrology in patterned structures
US-2018052119-A1 · Feb 22, 2018 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Nova Measuring Instr Ltd | 5 |
| IBM | 2 |
| Nova Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01B11/02 | 4 |
| G01N2201/12 | 4 |
| G03F7/70616 | 4 |
| G01B2210/56 | 4 |
| G01N21/956 | 4 |