Method to calibrate, predict, and control stochastic defects in EUV lithography
US-12579631-B2 · Mar 17, 2026 · US
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Ko Kyeongeun patents
Ko Kyeongeun is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ko Kyeongeun |
| Total patents | 6 |
| First publication | Mar 27, 2025 |
| Latest publication | Mar 17, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Method to calibrate, predict, and control stochastic defects in EUV lithography
US-12561791-B2 · Feb 24, 2026 · US
Method to calibrate, predict, and control stochastic defects in EUV lithography
US-12561790-B2 · Feb 24, 2026 · US
Method to calibrate, predict, and control stochastic defects in euv lithography
US-2025104216-A1 · Mar 27, 2025 · US
Method to calibrate, predict, and control stochastic defects in euv lithography
US-2025104214-A1 · Mar 27, 2025 · US
Method to calibrate, predict, and control stochastic defects in euv lithography
US-2025104215-A1 · Mar 27, 2025 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Corp | 6 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G06T2207/30242 | 6 |
| G06T7/0006 | 6 |
| G06T2207/20081 | 6 |
| G06T2207/30148 | 6 |
| G06T2207/30164 | 6 |