Canister, precursor transfer system having the same and method for measuring precursor remaining amount thereof
US-12590366-B2 · Mar 31, 2026 · US
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Kim Sunja patents
Kim Sunja is listed as an inventor on 8 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Kim Sunja |
| Total patents | 8 |
| First publication | Jan 6, 2022 |
| Latest publication | Mar 31, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Semiconductor processing method
US-12451347-B2 · Oct 21, 2025 · US
Silicon nitride and silicon oxide deposition methods using fluorine inhibitor
US-12431354-B2 · Sep 30, 2025 · US
Methods for filling a gap and related systems and devices
US-12027365-B2 · Jul 2, 2024 · US
Canister, precursor transfer system having the same and method for measuring precursor remaining amount thereof
US-2024124972-A1 · Apr 18, 2024 · US
Semiconductor processing method
US-2022310387-A1 · Sep 29, 2022 · US
Methods for filling a gap and related systems and devices
US-2022165569-A1 · May 26, 2022 · US
Silicon nitride and silicon oxide deposition methods using fluorine inhibitor
US-2022005693-A1 · Jan 6, 2022 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asm Ip Holding Bv | 6 |
| Samsung Electronics Co Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P14/6339 | 6 |
| H10P14/6336 | 6 |
| C23C16/45553 | 6 |
| C23C16/45527 | 6 |
| H10P14/69215 | 4 |