Substrate processing apparatus, cleaning method, and method of manufacturing semiconductor device
US-12488999-B2 · Dec 2, 2025 · US
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Ikeda Yuma patents
Ikeda Yuma is listed as an inventor on 9 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Ikeda Yuma |
| Total patents | 9 |
| First publication | Mar 30, 2023 |
| Latest publication | Dec 2, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Cleaning method, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus
US-2025293016-A1 · Sep 18, 2025 · US
Work machine
US-12397867-B2 · Aug 26, 2025 · US
Cleaning method, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus
US-12354868-B2 · Jul 8, 2025 · US
Work machine
US-2025206395-A1 · Jun 26, 2025 · US
Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US-2025118567-A1 · Apr 10, 2025 · US
Substrate processing apparatus, method of manufacturing semiconductor device and substrate support
US-2023304149-A1 · Sep 28, 2023 · US
Cleaning method, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus
US-2023223247-A1 · Jul 13, 2023 · US
Substrate processing apparatus, cleaning method, and method of manufacturing semiconductor device
US-2023096542-A1 · Mar 30, 2023 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kokusai Electric Corp | 7 |
| Kubota Kk | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0402 | 6 |
| H10P70/23 | 5 |
| H01L21/0206 | 5 |
| H10P14/6339 | 4 |
| H10P14/69391 | 4 |