Facet mirror for an illumination optical unit of a projection exposure apparatus
US-11789367-B2 · Oct 17, 2023 · US
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Holderer Hubert patents
Holderer Hubert is listed as an inventor on 15 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Holderer Hubert |
| Total patents | 15 |
| First publication | Apr 23, 2015 |
| Latest publication | Oct 17, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Measurement illumination optical unit for guiding illumination light into an object field of a projection exposure system for EUV lithography
US-11720028-B2 · Aug 8, 2023 · US
Beam-forming and illuminating system for a lithography system, lithography system, and method
US-11448968-B2 · Sep 20, 2022 · US
Imaging optical unit for EUV microlithography
US-11422470-B2 · Aug 23, 2022 · US
Facet mirror for an illumination optical unit of a projection exposure apparatus
US-2022206398-A1 · Jun 30, 2022 · US
Measurement illumination optical unit for guiding illumination light into an object field of a projection exposure system for euv lithography
US-2022057717-A1 · Feb 24, 2022 · US
Method for producing an illumination system for an EUV projection exposure system, and illumination system
US-11048172-B2 · Jun 29, 2021 · US
Beam-forming and illuminating system for a lithography system, lithography system, and method
US-2021003925-A1 · Jan 7, 2021 · US
Imaging optical unit for euv microlithography
US-2020348602-A1 · Nov 5, 2020 · US
Method for producing an illumination system for an euv projection exposure system, and illumination system
US-2020110340-A1 · Apr 9, 2020 · US
Recent patents
Latest publications not already listed above.
Method for producing an illumination system for an EUV projection exposure system, and illumination system
US-10514608-B2 · Dec 24, 2019 · US
Method for producing an illumination system for an euv projection exposure system, and illumination system
US-2018373158-A1 · Dec 27, 2018 · US
Optical imaging device with thermal attenuation
US-2018181007-A1 · Jun 28, 2018 · US
Optical imaging device with thermal attenuation
US-9810996-B2 · Nov 7, 2017 · US
Optical imaging device with thermal attenuation
US-2015109591-A1 · Apr 23, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 15 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70075 | 10 |
| G03F7/7085 | 9 |
| G03F7/70033 | 8 |
| G03F7/702 | 8 |
| G03F7/70141 | 6 |