Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
US-12586757-B2 · Mar 24, 2026 · US
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Herzig Brett patents
Herzig Brett is listed as an inventor on 6 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Herzig Brett |
| Total patents | 6 |
| First publication | Mar 5, 2020 |
| Latest publication | Mar 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Modular recipe controlled calibration (mrcc) apparatus used to balance plasma in multiple station system
US-2023245853-A1 · Aug 3, 2023 · US
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
US-11594397-B2 · Feb 28, 2023 · US
Modular recipe controlled calibration (mrcc) apparatus used to balance plasma in multiple station system
US-2021202208-A1 · Jul 1, 2021 · US
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
US-10991550-B2 · Apr 27, 2021 · US
Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
US-2020075289-A1 · Mar 5, 2020 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 6 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7624 | 6 |
| H01J37/321 | 6 |
| H01J37/32091 | 6 |
| H01J37/32183 | 6 |
| H01L21/68785 | 6 |