Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber
US-9234775-B2 · Jan 12, 2016 · US
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Hefty Robert C patents
Hefty Robert C is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Hefty Robert C |
| Total patents | 1 |
| First publication | Jan 12, 2016 |
| Latest publication | Jan 12, 2016 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01F25/0007 | 1 |
| G01F1/42 | 1 |
| G05D7/0652 | 1 |
| G01F1/36 | 1 |
| G01F25/10 | 1 |