Method and inspection apparatus and computer program product for assessing a quality of reconstruction of a value of a parameter of interest of a structure
US-9760018-B2 · Sep 12, 2017 · US
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Grootjans Willem Jan patents
Grootjans Willem Jan is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Grootjans Willem Jan |
| Total patents | 4 |
| First publication | Oct 29, 2015 |
| Latest publication | Sep 12, 2017 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and apparatus for determining lithographic quality of a structure
US-9518936-B2 · Dec 13, 2016 · US
Method and Inspection Apparatus and Computer Program Product for Assessing a Quality of Reconstruction of a Value of a Parameter of Interest of a Structure
US-2016154319-A1 · Jun 2, 2016 · US
Method and Apparatus for Determining Lithographic Quality of a Structure
US-2015308966-A1 · Oct 29, 2015 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Asml Netherlands Bv | 5 |
| Asml Nertherlands B V | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G01N21/95607 | 4 |
| G03F7/70625 | 4 |
| G03F7/705 | 2 |
| G01N21/956 | 2 |
| G03F9/7092 | 2 |