Method for producing an optical imaging system for a microlithography apparatus
US-2026072364-A1 · Mar 12, 2026 · US
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Golde Daniel patents
Golde Daniel is listed as an inventor on 11 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Golde Daniel |
| Total patents | 11 |
| First publication | Jun 15, 2017 |
| Latest publication | Mar 12, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Stop, optical system and lithography apparatus
US-12222655-B2 · Feb 11, 2025 · US
Mirror, in particular for a microlithographic projection exposure apparatus
US-12210289-B2 · Jan 28, 2025 · US
Mirror, in particular for a microlithographic projection exposure apparatus
US-2023122333-A1 · Apr 20, 2023 · US
Stop, optical system and lithography apparatus
US-2022107567-A1 · Apr 7, 2022 · US
Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography
US-10591825-B2 · Mar 17, 2020 · US
Projection Lens, Projection Exposure Apparatus and Projection Exposure Method for EUV Microlithography
US-2018364583-A1 · Dec 20, 2018 · US
Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography
US-10048592-B2 · Aug 14, 2018 · US
Projection exposure method and projection exposure apparatus
US-9933710-B2 · Apr 3, 2018 · US
Projection exposure method and projection exposure apparatus
US-2017285493-A1 · Oct 5, 2017 · US
Recent patents
Latest publications not already listed above.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 11 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70233 | 7 |
| G03F7/70258 | 7 |
| G03F7/70266 | 6 |
| G03F7/70275 | 6 |
| G03F7/7015 | 4 |