High efficiency triple-coil inductively coupled plasma source with phase control
US-10271416-B2 · Apr 23, 2019 · US
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Giar Ryan patents
Giar Ryan is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Giar Ryan |
| Total patents | 1 |
| First publication | Apr 23, 2019 |
| Latest publication | Apr 23, 2019 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H05H2001/4667 | 1 |
| H05H1/46 | 1 |
| H05H1/4652 | 1 |
| H01J37/32183 | 1 |
| H01J37/32174 | 1 |