System and method for optimizing a lithography exposure process
US-11531279-B2 · Dec 20, 2022 · US
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Fitzgerald Wayne patents
Fitzgerald Wayne is listed as an inventor on 4 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Fitzgerald Wayne |
| Total patents | 4 |
| First publication | Jul 23, 2020 |
| Latest publication | Dec 20, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
System and method for optimizing a lithography exposure process
US-2022075282-A1 · Mar 10, 2022 · US
System and method for optimizing a lithography exposure process
US-11126096-B2 · Sep 21, 2021 · US
System and method for optimizing a lithography exposure process
US-2020233320-A1 · Jul 23, 2020 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Onto Innovation Inc | 4 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70491 | 4 |
| G03F7/70425 | 4 |
| G03F9/7003 | 4 |
| G03F7/70433 | 4 |
| G03F9/7023 | 4 |