Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Methods and Apparatus
US-2018228015-A1 · Aug 9, 2018 · US
Entley William is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Entley William |
| Total patents | 2 |
| First publication | May 8, 2018 |
| Latest publication | Aug 9, 2018 |
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Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 2 |
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H05H1/50 | 2 |
| H01J37/32816 | 2 |
| H01J37/32669 | 2 |
| H01J37/32082 | 2 |
| H05H1/46 | 2 |