Method for determining an imaging quality of an optical system when illuminated by illumination light within an entrance pupil to be measured
US-12492963-B2 · Dec 9, 2025 · US
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Decker Manuel patents
Decker Manuel is listed as an inventor on 10 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Decker Manuel |
| Total patents | 10 |
| First publication | Sep 9, 2021 |
| Latest publication | Dec 9, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Optical system for a metrology system and metrology system with such an optical system
US-2025208397-A1 · Jun 26, 2025 · US
Diffractive optical element, method for designing an efficiency-achromatized diffractive structure, and method for producing an efficiency-achromatized diffractive element
US-12253695-B2 · Mar 18, 2025 · US
Mask inspection device for photomasks of euv lithography and carrier element for use in a mask inspection device
US-2025044680-A1 · Feb 6, 2025 · US
Optical system for a metrology system and metrology system with such an optical system
US-2024369946-A1 · Nov 7, 2024 · US
Optical system for a metrology system and metrology system with such an optical system
US-2024369945-A1 · Nov 7, 2024 · US
Method for simulating illumination and imaging properties of an optical production system during the illumination and imaging of an object by means of an optical measurement system
US-2024361704-A1 · Oct 31, 2024 · US
Method for determining an imaging quality of an optical system when illuminated by illumination light within an entrance pupil to be measured
US-2022381643-A1 · Dec 1, 2022 · US
Diffractive optical element, method for designing an efficiency-achromatized diffractive structure, and method for producing an efficiency-achromatized diffractive element
US-2022196896-A1 · Jun 23, 2022 · US
Spectacle lens having a diffraction structure for light
US-2021278702-A1 · Sep 9, 2021 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 7 |
| Zeiss Carl Ag | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F1/84 | 6 |
| G01N21/956 | 3 |
| G03F7/70666 | 3 |
| G01M11/0264 | 3 |
| G02B27/0012 | 3 |