Oxidizing treatment of aluminum nitride films in semiconductor device manufacturing
US-10651080-B2 · May 12, 2020 · US
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Damjanovic Daniel patents
Damjanovic Daniel is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Damjanovic Daniel |
| Total patents | 7 |
| First publication | Oct 6, 2015 |
| Latest publication | May 12, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
Oxidizing treatment of aluminum nitride films in semiconductor device manufacturing
US-2017309514-A1 · Oct 26, 2017 · US
Methods for formation of low-k aluminum-containing etch stop films
US-9633896-B1 · Apr 25, 2017 · US
Methods for formation of low-k aluminum-containing etch stop films
US-2017103914-A1 · Apr 13, 2017 · US
Method of reducing semiconductor window layer loss during thin film photovoltaic device fabrication, and resulting device structure
US-9437760-B2 · Sep 6, 2016 · US
Photovoltaic device with protective layer over a window layer and method of manufacture of the same
US-9276154-B2 · Mar 1, 2016 · US
Process for forming a capacitor structure with rutile titanium oxide dielectric film
US-9153640-B2 · Oct 6, 2015 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Lam Res Corp | 4 |
| First Solar Inc | 2 |
| Nanya Technology Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01L21/31144 | 4 |
| H01L21/76834 | 4 |
| H01L21/02178 | 4 |
| H10P50/73 | 4 |
| H10P14/69391 | 4 |