Carbon containing hardmask removal process using sulfur containing process gas
US-11264249-B2 · Mar 1, 2022 · US
This page is not indexed by search engines while we improve data quality.
Dai Fen patents
Dai Fen is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Dai Fen |
| Total patents | 2 |
| First publication | Jun 18, 2020 |
| Latest publication | Mar 1, 2022 |
Notable patents
Publications ranked by popularity score, then publication date.
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Mattson Tech Inc | 2 |
| Beijing E Town Semiconductor Tech Co Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P76/4085 | 2 |
| H10P76/405 | 2 |
| H10P50/73 | 2 |
| H10P50/285 | 2 |
| H10P50/283 | 2 |