Apparatus for generating extreme ultraviolet light and lithography apparatus including the same
US-11720027-B2 · Aug 8, 2023 · US
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Choi Daerim patents
Choi Daerim is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Choi Daerim |
| Total patents | 2 |
| First publication | Mar 17, 2022 |
| Latest publication | Aug 8, 2023 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/70033 | 2 |
| G03F7/70166 | 2 |
| G03F7/70858 | 2 |
| G03F7/70916 | 2 |
| G03F7/70933 | 2 |