Inspection method, substrate processing method including the same, and substrate processing device using the substrate processing method
US-12449375-B2 · Oct 21, 2025 · US
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Cho Taeil patents
Cho Taeil is listed as an inventor on 7 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Cho Taeil |
| Total patents | 7 |
| First publication | May 13, 2021 |
| Latest publication | Oct 21, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Apparatus for processing a substrate
US-2025316458-A1 · Oct 9, 2025 · US
Substrate processing apparatus and substrate processing method using the same
US-2025253128-A1 · Aug 7, 2025 · US
Gas supply assembly and semiconductor wafer processing apparatus using the same
US-2025132134-A1 · Apr 24, 2025 · US
Inspection method, substrate processing method including the same, and substrate processing device using the substrate processing method
US-2024201103-A1 · Jun 20, 2024 · US
Plasma processing apparatus and method of manufacturing semiconductor device using the same
US-11348760-B2 · May 31, 2022 · US
Plasma processing apparatus and method of manufacturing semiconductor device using the same
US-2021142985-A1 · May 13, 2021 · US
Recent patents
Latest publications not already listed above.
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Samsung Electronics Co Ltd | 7 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/72 | 4 |
| H01J37/32715 | 4 |
| H01J37/3244 | 3 |
| H01L21/6831 | 3 |
| H01J37/32082 | 2 |