Wafer cleaning system
US-2024371667-A1 · Nov 7, 2024 · US
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Chen you-feng patents
Chen you-feng is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Chen you-feng |
| Total patents | 12 |
| First publication | Jun 25, 2015 |
| Latest publication | Nov 7, 2024 |
Notable patents
Publications ranked by popularity score, then publication date.
Wafer cleaning method
US-12087602-B2 · Sep 10, 2024 · US
Wafer cleaning method
US-2023360938-A1 · Nov 9, 2023 · US
Wafer cleaning system and method
US-11742227-B2 · Aug 29, 2023 · US
Wafer cleaning system and method
US-2020135516-A1 · Apr 30, 2020 · US
Wafer cleaning system and method
US-10515833-B2 · Dec 24, 2019 · US
Photoresist nozzle device and photoresist supply system
US-10074547-B2 · Sep 11, 2018 · US
Cup-wash device, semiconductor apparatus, and cup cleaning method
US-9919350-B2 · Mar 20, 2018 · US
Cup-wash device, semiconductor apparatus, and cup cleaning method
US-2016276207-A1 · Sep 22, 2016 · US
Wafer cleaning system and method
US-2015214027-A1 · Jul 30, 2015 · US
Recent patents
Latest publications not already listed above.
Method for controlling exhaust flow in wafer processing module
US-2015191816-A1 · Jul 9, 2015 · US
Photoresist nozzle device and photoresist supply system
US-2015179483-A1 · Jun 25, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Taiwan Semiconductor Mfg Co Ltd | 12 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0604 | 8 |
| H10P70/56 | 7 |
| H10P72/0412 | 7 |
| B08B1/12 | 7 |
| H01L21/67253 | 7 |