System and method to adjust a kinetics model of surface reactions during plasma processing
US-11966203-B2 · Apr 23, 2024 · US
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Chen Yeurui patents
Chen Yeurui is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Chen Yeurui |
| Total patents | 2 |
| First publication | Feb 25, 2021 |
| Latest publication | Apr 23, 2024 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Kla Corp | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P74/23 | 2 |
| G05B17/02 | 2 |
| G05B13/042 | 2 |
| G01N23/201 | 2 |
| G01N21/21 | 2 |