Pace control for substrate processing operations
US-2026048477-A1 · Feb 19, 2026 · US
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Chen Chi Hung patents
Chen Chi Hung is listed as an inventor on 1 patent in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Chen Chi Hung |
| Total patents | 1 |
| First publication | Feb 19, 2026 |
| Latest publication | Feb 19, 2026 |
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Major assignees
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| Assignee | Patents |
|---|---|
| Applied Materials Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| B24B37/005 | 1 |
| B24B51/00 | 1 |