Pellicle assembly and method for advanced lithography
US-9759997-B2 · Sep 12, 2017 · US
This page is not indexed by search engines while we improve data quality.
Chen Amö patents
Chen Amö is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Chen Amö |
| Total patents | 2 |
| First publication | Jun 22, 2017 |
| Latest publication | Sep 12, 2017 |
Notable patents
Publications ranked by popularity score, then publication date.
Pellicle Assembly and Method for Advanced Lithography
US-2017176850-A1 · Jun 22, 2017 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Taiwan Semiconductor Mfg Co Ltd | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P76/2041 | 2 |
| G03F1/62 | 2 |
| G03F1/64 | 2 |
| G03F7/20 | 2 |
| G03F1/22 | 2 |