System and method for automatic gas optimization in a two-chamber gas discharge laser system
US-9831628-B2 · Nov 28, 2017 · US
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Borrello Michael patents
Borrello Michael is listed as an inventor on 3 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Borrello Michael |
| Total patents | 3 |
| First publication | Sep 8, 2015 |
| Latest publication | Nov 28, 2017 |
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Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Cymer LLC | 3 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01S3/036 | 3 |
| H01S3/104 | 3 |
| H01S3/2251 | 3 |
| H01S3/2207 | 3 |
| H01S3/13 | 3 |