Method and device for characterizing a mask for microlithography
US-10698318-B2 · Jun 30, 2020 · US
This page is not indexed by search engines while we improve data quality.
Birkner Robert patents
Birkner Robert is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Birkner Robert |
| Total patents | 2 |
| First publication | Jan 10, 2019 |
| Latest publication | Jun 30, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
Method and device for characterizing a mask for microlithography
US-2019011839-A1 · Jan 10, 2019 · US
Recent patents
Latest publications not already listed above.
No data yet.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/706851 | 2 |
| G03F7/706849 | 2 |
| G03F7/70566 | 2 |
| G03F7/70508 | 2 |
| G03F7/70141 | 2 |