Compensation for substrate doping in edge reconstruction for in-situ electromagnetic inductive monitoring
US-2026014663-A1 · Jan 15, 2026 · US
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Bennett Doyle E patents
Bennett Doyle E is listed as an inventor on 26 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Bennett Doyle E |
| Total patents | 26 |
| First publication | Apr 30, 2015 |
| Latest publication | Jan 15, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Compensation for substrate doping in edge reconstruction for in-situ electromagnetic inductive monitoring
US-12447578-B2 · Oct 21, 2025 · US
Technique for training neural network for use in in-situ monitoring during polishing and polishing system
US-12136574-B2 · Nov 5, 2024 · US
Trained neural network in in-situ monitoring during polishing and polishing system
US-12057354-B2 · Aug 6, 2024 · US
Technique for training neural network for use in in-situ monitoring during polishing and polishing system
US-2024014080-A1 · Jan 11, 2024 · US
Technique for training neural network for use in in-situ monitoring during polishing and polishing system
US-11791224-B2 · Oct 17, 2023 · US
Trained neural network in in-situ monitoring during polishing and polishing system
US-2023290691-A1 · Sep 14, 2023 · US
Using a trained neural network for use in in-situ monitoring during polishing and polishing system
US-11658078-B2 · May 23, 2023 · US
Compensation for substrate doping in edge reconstruction for in-situ electromagnetic inductive monitoring
US-2021379723-A1 · Dec 9, 2021 · US
Using a trained neural network for use in in-situ monitoring during polishing and polishing system
US-2021358819-A1 · Nov 18, 2021 · US
Recent patents
Latest publications not already listed above.
Technique for training neural network for use in in-situ monitoring during polishing and polishing system
US-2021354265-A1 · Nov 18, 2021 · US
Determination of gain for eddy current sensor
US-10556315-B2 · Feb 11, 2020 · US
Determination of gain for eddy current sensor
US-2019134775-A1 · May 9, 2019 · US
Determination of gain for eddy current sensor
US-10207386-B2 · Feb 19, 2019 · US
Adjusting eddy current measurements
US-9636797-B2 · May 2, 2017 · US
Determination of gain for eddy current sensor
US-2016158908-A1 · Jun 9, 2016 · US
Multi-Platen Multi-Head Polishing Architecture
US-2016101497-A1 · Apr 14, 2016 · US
Determination of gain for eddy current sensor
US-9281253-B2 · Mar 8, 2016 · US
Determination of gain for eddy current sensor
US-9275917-B2 · Mar 1, 2016 · US
Multi-platen multi-head polishing architecture
US-9227293-B2 · Jan 5, 2016 · US
Endpointing with selective spectral monitoring
US-9221147-B2 · Dec 29, 2015 · US
In-situ monitoring system with monitoring of elongated region
US-9205527-B2 · Dec 8, 2015 · US
Adjusting eddy current measurements
US-2015224623-A1 · Aug 13, 2015 · US
Path for probe of spectrographic metrology system
US-9056383-B2 · Jun 16, 2015 · US
Determination of gain for eddy current sensor
US-2015118766-A1 · Apr 30, 2015 · US
Determination of gain for eddy current sensor
US-2015118765-A1 · Apr 30, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 26 |
| Qian Jun | 1 |
| Dhandapani Sivakumar | 1 |
| Cherian Benjamin | 1 |
| Osterheld Thomas H | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| B24B37/013 | 26 |
| B24B49/105 | 21 |
| H10P74/238 | 19 |
| H10P74/207 | 19 |
| H10P52/403 | 16 |