Method and equipment for leakage testing of electrostatic chuck
US-12566100-B2 · Mar 3, 2026 · US
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Bae Da-Som patents
Bae Da-Som is listed as an inventor on 2 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Bae Da-Som |
| Total patents | 2 |
| First publication | Jun 29, 2023 |
| Latest publication | Mar 3, 2026 |
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Method and equipment for leakage testing of electrostatic chuck
US-2023204448-A1 · Jun 29, 2023 · US
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Major assignees
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| Assignee | Patents |
|---|---|
| Semes Co Ltd | 2 |
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