Adjusting chamber performance by equipment constant updates
US-12560916-B2 · Feb 24, 2026 · US
This page is not indexed by search engines while we improve data quality.
Babayan Steven patents
Babayan Steven is listed as an inventor on 17 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Babayan Steven |
| Total patents | 17 |
| First publication | Nov 26, 2020 |
| Latest publication | Feb 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Determining equipment constant updates by machine learning
US-12504726-B2 · Dec 23, 2025 · US
Chamber matching by equipment constant updates
US-12498705-B2 · Dec 16, 2025 · US
Process kit enclosure system
US-2025087524-A1 · Mar 13, 2025 · US
Lift pin mechanism
US-12211734-B2 · Jan 28, 2025 · US
Process kit enclosure system
US-12165905-B2 · Dec 10, 2024 · US
Determining equipment constant updates by machine learning
US-2024176312-A1 · May 30, 2024 · US
Chamber matching by equipment constant updates
US-2024176336-A1 · May 30, 2024 · US
Adjusting chamber performance by equipment constant updates
US-2024176334-A1 · May 30, 2024 · US
Substrate placement optimization using substrate measurements
US-2024069537-A1 · Feb 29, 2024 · US
Recent patents
Latest publications not already listed above.
Process kit ring adaptor
US-11842917-B2 · Dec 12, 2023 · US
Lift pin mechanism
US-2022293452-A1 · Sep 15, 2022 · US
Methods and apparatus for tuning semiconductor processes
US-2021287881-A1 · Sep 16, 2021 · US
Process kit ring adaptor
US-2021217650-A1 · Jul 15, 2021 · US
Process kit ring adaptor
US-10964584-B2 · Mar 30, 2021 · US
Process kit enclosure system
US-2020373190-A1 · Nov 26, 2020 · US
Process kit ring adaptor
US-2020373194-A1 · Nov 26, 2020 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 17 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7602 | 7 |
| H10P72/50 | 7 |
| H10P72/3306 | 7 |
| H01L21/68 | 7 |
| H01L21/68707 | 7 |