Flared shutter liner for chemical vapor deposition system
US-2025263837-A1 · Aug 21, 2025 · US
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Armour Eric patents
Armour Eric is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Armour Eric |
| Total patents | 14 |
| First publication | Jul 2, 2015 |
| Latest publication | Aug 21, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Wafer carrier assembly with improved temperature uniformity
US-2024102166-A1 · Mar 28, 2024 · US
Chemical vapor deposition wafer carriers
US-2020063287-A1 · Feb 27, 2020 · US
Periphery purge shutter and flow control systems and methods
US-10570510-B2 · Feb 25, 2020 · US
Chemical vapor deposition wafer carriers
US-2020056284-A1 · Feb 20, 2020 · US
Wafer carrier having thermal cover for chemical vapor deposition systems
US-2019157125-A1 · May 23, 2019 · US
Wafer carrier having thermal cover for chemical vapor deposition systems
US-10134617-B2 · Nov 20, 2018 · US
Enhanced enclosures for acoustical gas concentration sensing and flow control
US-10099185-B2 · Oct 16, 2018 · US
Periphery purge shutter and flow control systems and methods
US-2017253967-A1 · Sep 7, 2017 · US
Method and apparatus for controlled dopant incorporation and activation in a chemical vapor deposition system
US-9748113-B2 · Aug 29, 2017 · US
Recent patents
Latest publications not already listed above.
Wafer carrier having thermal uniformity-enhancing features
US-2017121847-A1 · May 4, 2017 · US
Method and apparatus for controlled dopant incorporation and activation in a chemical vapor deposition system
US-2017032974-A1 · Feb 2, 2017 · US
Enhanced enclosures for acoustical gas concentration sensing and flow control
US-2016041126-A1 · Feb 11, 2016 · US
Water Carrier Having Thermal Cover for Chemical Vapor Deposition Systems
US-2015187620-A1 · Jul 2, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Veeco Instr Inc | 15 |
| Veeco Intruments Inc | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/4584 | 10 |
| H10P72/7621 | 8 |
| H10P72/7618 | 8 |
| H01L21/68771 | 6 |
| C23C16/46 | 5 |