Extreme ultraviolet (euv) source and a substrate processing apparatus including the same
US-2025076776-A1 · Mar 6, 2025 · US
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Patent family 94774091
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 94774091 |
| Family type | — |
| Earliest priority | Sep 1, 2023 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2025076776A1 — Extreme ultraviolet (euv) source and a substrate processing apparatus including the same |
Representative publication
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US2025076776A1 — Extreme ultraviolet (euv) source and a substrate processing apparatus including the same (published Mar 6, 2025)
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