Substrate processing method, plasma processing apparatus, and substrate processing system
US-2025273621-A1 · Aug 28, 2025 · US
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Patent family 91084804
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 91084804 |
| Family type | — |
| Earliest priority | Nov 17, 2022 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2025273621A1 — Substrate processing method, plasma processing apparatus, and substrate processing system |
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US2025273621A1 — Substrate processing method, plasma processing apparatus, and substrate processing system (published Aug 28, 2025)
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