Low-cost high-purity vacuum pumps and systems
US-2026071820-A1 · Mar 12, 2026 · US
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Patent family 90454990
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 90454990 |
| Family type | — |
| Earliest priority | Sep 2, 2022 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2026071820A1 — Low-cost high-purity vacuum pumps and systems |
Representative publication
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US2026071820A1 — Low-cost high-purity vacuum pumps and systems (published Mar 12, 2026)
Member publications
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