Film deposition apparatus and film deposition method
US-12359302-B2 · Jul 15, 2025 · US
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Patent family 89907441
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 89907441 |
| Family type | — |
| Earliest priority | Aug 17, 2022 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12359302B2 — Film deposition apparatus and film deposition method |
Representative publication
Best representative member for this family based on priority and filing country.
US12359302B2 — Film deposition apparatus and film deposition method (published Jul 15, 2025)
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Film deposition apparatus and film deposition method
US-2024060170-A1 · Feb 22, 2024 · US