Substrate processing apparatus and substrate processing method
US-12424459-B2 · Sep 23, 2025 · US
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Patent family 89489697
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 89489697 |
| Family type | — |
| Earliest priority | Jul 14, 2022 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12424459B2 — Substrate processing apparatus and substrate processing method |
Representative publication
Best representative member for this family based on priority and filing country.
US12424459B2 — Substrate processing apparatus and substrate processing method (published Sep 23, 2025)
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Substrate processing apparatus and substrate processing method
US-2024021445-A1 · Jan 18, 2024 · US