Film forming apparatus for forming metal film and film forming method for forming metal film
US-12123103-B2 · Oct 22, 2024 · US
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Patent family 85961329
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 85961329 |
| Family type | — |
| Earliest priority | Oct 14, 2021 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12123103B2 — Film forming apparatus for forming metal film and film forming method for forming metal film |
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US12123103B2 — Film forming apparatus for forming metal film and film forming method for forming metal film (published Oct 22, 2024)
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