Substrate processing method and substrate processing apparatus
US-2025132164-A1 · Apr 24, 2025 · US
This page is not indexed by search engines while we improve data quality.
Patent family 85321922
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 85321922 |
| Family type | — |
| Earliest priority | Aug 24, 2021 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2025132164A1 — Substrate processing method and substrate processing apparatus |
Representative publication
Best representative member for this family based on priority and filing country.
US2025132164A1 — Substrate processing method and substrate processing apparatus (published Apr 24, 2025)
Member publications
Related publications in this family.