Substrate processing condition setting method, substrate processing method, substrate processing condition setting system, and substrate processing system
US-12476124-B2 · Nov 18, 2025 · US
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Patent family 85198942
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 85198942 |
| Family type | — |
| Earliest priority | Feb 18, 2022 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12476124B2 — Substrate processing condition setting method, substrate processing method, substrate processing condition setting system, and substrate processing system |
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US12476124B2 — Substrate processing condition setting method, substrate processing method, substrate processing condition setting system, and substrate processing system (published Nov 18, 2025)
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