Fast independent checker for extreme ultraviolet (EUV) routing
US-11966682-B2 · Apr 23, 2024 · US
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Patent family 85153689
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 85153689 |
| Family type | — |
| Earliest priority | Jul 30, 2021 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11966682B2 — Fast independent checker for extreme ultraviolet (EUV) routing |
Representative publication
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US11966682B2 — Fast independent checker for extreme ultraviolet (EUV) routing (published Apr 23, 2024)
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