Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process
US-12183560-B2 · Dec 31, 2024 · US
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Patent family 81942242
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 81942242 |
| Family type | — |
| Earliest priority | Dec 14, 2020 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US12183560B2 — Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process |
Representative publication
Best representative member for this family based on priority and filing country.
US12183560B2 — Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process (published Dec 31, 2024)
Member publications
Related publications in this family.
Gas injection process kit to eliminate arcing and improve uniform gas distribution for a pvd process
US-2023187191-A1 · Jun 15, 2023 · US
Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process
US-11600477-B2 · Mar 7, 2023 · US
Gas injection process kit to eliminate arcing and improve uniform gas distribution for a pvd process
US-2022186361-A1 · Jun 16, 2022 · US