Process for the preparation of aluminum scandium nitride films
US-2024229221-A1 · Jul 11, 2024 · US
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Patent family 81846227
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 81846227 |
| Family type | — |
| Earliest priority | May 12, 2021 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2024229221A1 — Process for the preparation of aluminum scandium nitride films |
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US2024229221A1 — Process for the preparation of aluminum scandium nitride films (published Jul 11, 2024)
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