Substrate processing system, substrate processing method, and control program
US-12062559-B2 · Aug 13, 2024 · US
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Patent family 81453634
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 81453634 |
| Family type | — |
| Earliest priority | Nov 10, 2020 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12062559B2 — Substrate processing system, substrate processing method, and control program |
Representative publication
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US12062559B2 — Substrate processing system, substrate processing method, and control program (published Aug 13, 2024)
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