Damper for an exhaust line of a semiconductor fabrication apparatus
US-12098792-B2 · Sep 24, 2024 · US
This page is not indexed by search engines while we improve data quality.
Patent family 80935535
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 80935535 |
| Family type | — |
| Earliest priority | Sep 18, 2020 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12098792B2 — Damper for an exhaust line of a semiconductor fabrication apparatus |
Representative publication
Best representative member for this family based on priority and filing country.
US12098792B2 — Damper for an exhaust line of a semiconductor fabrication apparatus (published Sep 24, 2024)
Member publications
Related publications in this family.