Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method
US-12422754-B2 · Sep 23, 2025 · US
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Patent family 80469697
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 80469697 |
| Family type | — |
| Earliest priority | Sep 4, 2020 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US12422754B2 — Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method |
Representative publication
Best representative member for this family based on priority and filing country.
US12422754B2 — Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method (published Sep 23, 2025)
Member publications
Related publications in this family.
Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method
US-2023244150-A1 · Aug 3, 2023 · US
Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method
US-11640115-B2 · May 2, 2023 · US
Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method
US-2022075268-A1 · Mar 10, 2022 · US