Distributed control system and semiconductor inspection apparatus including same
US-12147374-B2 · Nov 19, 2024 · US
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Patent family 78847061
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 78847061 |
| Family type | — |
| Earliest priority | Jun 11, 2020 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12147374B2 — Distributed control system and semiconductor inspection apparatus including same |
Representative publication
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US12147374B2 — Distributed control system and semiconductor inspection apparatus including same (published Nov 19, 2024)
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