Production method for a micromechanical component for a sensor device or microphone device
US-12589988-B2 · Mar 31, 2026 · US
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Patent family 78078235
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 78078235 |
| Family type | — |
| Earliest priority | Oct 15, 2020 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US12589988B2 — Production method for a micromechanical component for a sensor device or microphone device |
Representative publication
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US12589988B2 — Production method for a micromechanical component for a sensor device or microphone device (published Mar 31, 2026)
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