This page is not indexed by search engines while we improve data quality.

Patent family 77463564

This patent family groups 6 related publications across US. Members often share priority claims or equivalent filings in different countries.

Patent family metadata
Field	Value
Family ID	77463564
Family type	—
Earliest priority	Mar 2, 2020
First filing country	US
Member publications	6
Countries	US
Representative publication	US2026072354A1 — Process environment for inorganic resist patterning

Representative publication

Best representative member for this family based on priority and filing country.

US2026072354A1 — Process environment for inorganic resist patterning (published Mar 12, 2026)

Related publications in this family.