MEMS accelerometer with mechanically decoupled proof mass
US-11796560-B2 · Oct 24, 2023 · US
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Patent family 74859750
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 74859750 |
| Family type | — |
| Earliest priority | Mar 18, 2020 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11796560B2 — MEMS accelerometer with mechanically decoupled proof mass |
Representative publication
Best representative member for this family based on priority and filing country.
US11796560B2 — MEMS accelerometer with mechanically decoupled proof mass (published Oct 24, 2023)
Member publications
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Mems accelerometer with mechanically decoupled proof mass
US-2021293847-A1 · Sep 23, 2021 · US