Photoresist development with halide chemistries
US-2026072349-A1 · Mar 12, 2026 · US
This patent family groups 7 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 74061069 |
| Family type | — |
| Earliest priority | Jun 26, 2019 |
| First filing country | US |
| Member publications | 7 |
| Countries | US |
| Representative publication | US2026072349A1 — Photoresist development with halide chemistries |
Best representative member for this family based on priority and filing country.
US2026072349A1 — Photoresist development with halide chemistries (published Mar 12, 2026)
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